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Visual Inspection Equipment Capricorn(AOI)
Capricorn is an automated visual inspection device for the FPD manufacturing process. Image information captured by a dedicated line scan CCD camera is analyzed by a high-performance image processing device, and defect information (position, presence, shape, OK/NG, etc.) is output instantaneously. Defect information is used for problem analysis and yield management. For example, defect information is deployed to defect correction equipment downstream of inspection equipment and used. In addition, which equipment in the upstream process and how the defect occurred can be immediately grasped from the location and content of the defect. Since its launch in 2002, the device has been widely used in various manufacturing processes for FPD (Flat Panel Displays) and can handle glass substrates up to approximately 3 x 3.4 m. Especially in the CF (color filter) process and CELL process (lamination process of TFT substrate and color filter substrate) in the LCD (liquid crystal display) manufacturing process, as well as in the module process, it is widely used and is a semi-finished product.
Color Film Defect Repair Equipment Jupiter(CF Repair)
Jupiter is a device that corrects defects generated in the FPD manufacturing process, such as various defects such as protrusion-shaped defects generated during film formation, foreign matter mixed in the film, and missing pixels and wiring patterns. It corresponds. Using the uniquely developed multi-function correction head and high-speed stage, defects can be corrected with high accuracy and high speed. In addition, it is equipped with a high-performance microscope that can properly magnify according to the shape of the defect, allowing you to observe and analyze the defect with a clear image. Jupiter has been used by all customers involved in FPD manufacturing since its introduction in 1999 and is especially suitable for color filter (CF) processes due to its high correction quality, reliability and ease of operation. We are proud of our overwhelming delivery record and are still highly regarded.
TFT Defect Repair Equipment Taurus (TFT Repair)
The TFT (Thin Film Transistor) process is the most important and complex process in the FPD manufacturing process. The performance and quality of LCD (Liquid Crystal Display) and OLED (Organic EL Display) are largely influenced by the technology and quality of the TFT used. Taurus is a defect correction device that supports yield management* for TFT manufacturing, which has become increasingly complex and difficult as displays evolve. The metal film can be locally formed by the gas window laser CVD, and the open defect in the metal wiring can be corrected. In addition to correcting defects by applying conductive materials, high-performance lasers can also perform high-precision and low-damage corrections. In addition, by adopting a high-speed stage, the substrate processing time is shortened even for the world's largest glass substrate measuring 3m x 3.4m.
Precision Coordinate Measuring Equipment Mercury (TP/CD)
FPDs are made by precisely stacking multiple layers of fine patterns, such as thin wires and electrodes, on a huge glass substrate. In addition, LCD (Liquid Crystal Display) and OLED (Organic EL Display) are completed by various processes by stacking a color filter (CF) substrate and a vapor deposition mask on a TFT (Thin Film Transistor) substrate. The Mercury is a coordinate measurement device that measures a wide variety of substrates up to 3m x 3.4m with sub-micron accuracy during FPD manufacturing where stack-up accuracy is required. It also supports the dimensional measurement of tiny pixel patterns of a few microns, which is required when manufacturing high-definition OLEDs for smartphones. From its inception in 2000 to today, it has an overwhelming delivery record, is unmatched by other companies as an industry standard machine, and is still highly regarded.
Micro-Sizing Device Venus(CD)
With the high definition of FPD (Flat Panel Display), TFT (Thin Film Transistor) is becoming more and more complex, and micro-dimensioning machine is becoming more and more important as a yield management tool. Venus is a micro-dimension measuring machine that can measure various substrates up to 3m x 3.4m with sub-micron accuracy to support various measurement requirements.