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Testing equipment series
Nano System Solutions (NSS) became a wholly owned subsidiary of VTEC Group in 2019. NSS mainly provides Wafer Edge/front and back inspection equipment, Nanotography inspection equipment, and Maskless exposure machines for the domestic market. As a member of the VTEC Group, it will develop business in the Chinese market based on the technology and experience learned from the Japanese market.
Maskless Exposure Machine
The Maskless exposure machine uses a Digital Micromirror Device (DMD) as one of the spatial light modulators as an exposure pattern generator. device. Because exposure data created on a computer can be directly exposed, exposure patterns can be freely created.
