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FPD industrial business
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Automatic coating and developing equipment Dual-1000
Since its establishment, Litho Tech Japan has focused on the research of lithography technology. It has a very comprehensive lithography technology, including hardware, software and processes, and provides high-performance lithography process equipment and photoresist analysis equipment. Become a wholly-owned subsidiary of VTEC in 2021, join the equipment and lithography technology business for semiconductor material production, research and development, continue to innovate, and provide products and services that meet customer needs
Automatic development baking device LITHOTRAC CB-50
Automatic development baking device LITHOTRAC DB-50
Resin Analyzer RDA-760
Photoresist Development Analyzer RDA-790
Photoresist Development Analyzer RDA-800
Photoresist Flat Exposure Device VUVES-4700
