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Automatic development baking device LITHOTRAC DB-50
Automatic development baking device LITHOTRAC DB-50

Automatic development baking device LITHOTRAC DB-50

Since its establishment, Litho Tech Japan has focused on the research of lithography technology. It has a very comprehensive lithography technology, including hardware, software and processes, and provides high-performance lithography process equipment and photoresist analysis equipment. Become a wholly-owned subsidiary of VTEC in 2021, join the equipment and lithography technology business for semiconductor material production, research and development, continue to innovate, and provide products and services that meet customer needs

Contact UsTel: 86-021-64325386

  • Product description

  • Stabilization can be performed continuously from PEB processing to development, cleaning, and hard baking. In addition to the alkaline development specification, we have also introduced an organic development specification that takes into account safety and ease of use. In addition, we design the most suitable equipment for customers according to various development methods and substrate shapes.

    feature:
    Specifications such as development nozzles with reduced ejection pressure, programmable swing nozzles, repeat development function, high temperature/low temperature development are available depending on the application.

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