Reticle Visual Inspection Equipment Gemini(AOI)-VETON TECH(SHANGHAI）CO.，LTD

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Reticle Visual Inspection Equipment Gemini(AOI)

Photomasks for displays are becoming clearer and larger due to increased production of small and medium sized OLEDs and FPDs using G10.5 (about 3m x 3.4m) mother glass. Reticle detection device Gemini is a simplified high-precision X-axis air guide device, an active vibration isolation table combined with a high-rigidity stone table top three-dimensionally, a high-precision high-rigidity mask bracket, and a unique rotating mechanism, ceramic vertical air guide The original technology of the buoy technology and the internal CAD database conversion circuit are used for comparison and detection, as well as various detection logics such as "mura mapping" and "high-sensitivity detection function of micro-contact holes". The image processing engine provides high-speed, high-precision visual inspection, which meets 8K Photomask requirements for displays and small and medium organic EL displays. Additionally, the design is flexible enough to accommodate factory layouts such as semi-built-in vibration isolation tables and flat surfaces containing thin film handling systems for direct access to the AGV.

Product description

Photomasks for displays are becoming clearer and larger due to increased production of small and medium sized OLEDs and FPDs using G10.5 (about 3m x 3.4m) mother glass.

Gemini photomask detection device is a simplified high-precision X-axis air guide device, an active vibration isolation table combined with a high-rigidity stone table in a three-dimensional compact, a high-precision and high-rigidity mask bracket, and a unique rotating mechanism, ceramic vertical guide The original technology of the gas and other buoy technology and the internal CAD database conversion circuit are used for comparison and detection, as well as various detection logics such as "mura mapping" and "high sensitivity detection function of micro contact holes". The image processing engine provides high speed and high precision It can meet the photomask requirements of 8K displays and small and medium-sized organic EL displays.

In addition, the design is flexible enough to accommodate factory layouts such as semi-built-in vibration isolation tables and flat surfaces containing thin film handling systems for direct access to the AGV.