Mask defect correction equipment Sculptor(Repair)-VETON TECH(SHANGHAI）CO.，LTD

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Mask defect correction equipment Sculptor(Repair)

Sculptor is a defect correction device specially designed for FPD photomask defect correction. Open defects (missing or missing patterns) can be corrected by gas window laser CVD. In addition, it is equipped with a laser optimized for repairing short defects (abnormal pattern connections) for high-quality defect correction. It also supports photomask defect correction with halftone patterns* (patterns of light passing through a metal film). *(Photo) Observation image of halftone pattern transmitted illumination (The shading part is displayed in black, the transparent part is displayed in gray, and the translucent part is displayed in dark gray)

Product description

Sculptor is a defect correction device specially designed for FPD photomask defect correction.

Open defects (missing or missing patterns) can be corrected by gas window laser CVD. In addition, it is equipped with a laser optimized for repairing short defects (abnormal pattern connections) for high-quality defect correction. It also supports photomask defect correction with halftone patterns* (patterns of light passing through a metal film).

*(Photo) Observation image of halftone pattern transmitted illumination

(The shading part is displayed in black, the transparent part is displayed in gray, and the translucent part is displayed in dark gray)