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Automatic development baking device LITHOTRAC CB-50
Since its establishment, Litho Tech Japan has focused on the research of lithography technology. It has a very comprehensive lithography technology, including hardware, software and processes, and provides high-performance lithography process equipment and photoresist analysis equipment. Become a wholly-owned subsidiary of VTEC in 2021, join the equipment and lithography technology business for semiconductor material production, research and development, continue to innovate, and provide products and services that meet customer needs
- Product description
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It is an automatic spin coating equipment that performs the optimal coating treatment process according to the process and the function of various materials.
In addition to semiconductor device manufacturers, it is also used in a wide range of fields from R&D departments of manufacturers of semiconductor manufacturing equipment, materials, substrates, masks, etc. to production applications.feature:
Models and options for various coatings ranging from chemically amplified photoresist (ArF) to thick film photoresist and polyimide are available.