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Resin Analyzer RDA-760
Since its establishment, Litho Tech Japan has focused on the research of lithography technology. It has a very comprehensive lithography technology, including hardware, software and processes, and provides high-performance lithography process equipment and photoresist analysis equipment. Become a wholly-owned subsidiary of VTEC in 2021, join the equipment and lithography technology business for semiconductor material production, research and development, continue to innovate, and provide products and services that meet customer needs
- Product description
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It can measure the dissolution rate of resin and is the most suitable device for resin quality control.
feature:
Monitor wavelength: 950nm
Applicable photoresist film thickness: 500nm～10μm
Others: developer temperature control function, automatic wafer insertion, automatic developer supply and drainage function, compatible with organic solvents;
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