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Precision Coordinate Measuring Equipment Mercury SHR
Mercury SHR is a photomask coordinate measuring machine that achieves the highest level of measurement accuracy in the world. The device employs multiple techniques to measure giant photomasks with nanometer resolution. Air sliders and measuring stages with high positioning accuracy and high flatness, laser interferometers and linear encoders that control the position of the stage in nanometers, and the minimization of adverse environmental effects, etc. The advanced optomechanical system realizes the world's highest level of measurement accuracy. In addition, the accuracy calibration is performed using the original measurement software and the reference mask, and the error factors are completely corrected to ensure the high precision and reproducibility of the measurement.
