Product Service-Product Service-VETON TECH(SHANGHAI）CO.，LTD

In July 2019, VTEC Group and Xianyang Rainbow Optoelectronics Technology Co., Ltd. jointly established Xianyang Hongwei New Display Technology Co., Ltd. (CHVT), headquartered at No. 1 Gaoke 1st Road, Qindu District, Xianyang City, Shaanxi Province. The company is mainly engaged in the research and development, design, production and sales of OLED lighting lamps, lighting products and components, and strives to provide customers with high-quality products and after-sales service.

Display industry

In the development of the enterprise, VTEC Group strictly abides by the environmental laws and regulations of various countries, and constantly innovates, strives to provide environmentally friendly and low-carbon equipment, improves the production efficiency of customers, reduces power consumption, and reduces the load on the environment.

Testing equipment series

Nano System Solutions (NSS) became a wholly owned subsidiary of VTEC Group in 2019. NSS mainly provides Wafer Edge/front and back inspection equipment, Nanotography inspection equipment, and Maskless exposure machines for the domestic market. As a member of the VTEC Group, it will develop business in the Chinese market based on the technology and experience learned from the Japanese market.

Maskless Exposure Machine

The Maskless exposure machine uses a Digital Micromirror Device (DMD) as one of the spatial light modulators as an exposure pattern generator. device. Because exposure data created on a computer can be directly exposed, exposure patterns can be freely created.

Fully automatic MRAM probe system

OHT, a group company, is promoting the business of non-contact electrical inspection equipment for semiconductors. Semiconductor inspection devices using non-contact electrical inspection technology mastered in O/S testers for FPD, especially the original design of MRAM inspection devices, have received high evaluations. The first successful commercialization of fully automated detection of MRAM.

Fully automatic MRAM detector system

OHT, a group company, is promoting the business of non-contact electrical inspection equipment for semiconductors. Semiconductor inspection devices using non-contact electrical inspection technology mastered in O/S testers for FPD, especially the original design of MRAM inspection devices, have received high evaluations. The first successful commercialization of fully automated detection of MRAM.

Lighting luminous board

In July 2019, VTEC Group and Xianyang Rainbow Optoelectronics Technology Co., Ltd. jointly established Xianyang Hongwei New Display Technology Co., Ltd. (CHVT), headquartered at No. 1 Gaoke 1st Road, Qindu District, Xianyang City, Shaanxi Province. The company is mainly engaged in the research and development, design, production and sales of OLED lighting lamps, lighting products and components, and strives to provide customers with high-quality products and after-sales service.

Large glass substrate exposure equipment RZ

The large-scale glass substrate exposure equipment RZ is the core exposure equipment of the CF (color filter) process and is important in FPD (flat panel display) production. The RZ is an exposure device for the BM (Black Matrix) process released by NSK Technology*1 in 1994. Since then it has continued to grow and bear fruit with the evolution of FPD, and in 2018 sold the first G10.5 compatible machine (about 3m x 4m), establishing itself as an industry standard machine that we are proud of as a Exposure equipment, world-class share.

Roll to Roll exposure equipment DZ

The DZ is a close-contact exposure device best suited for exposure of IC leadframes, HDD suspended load beams, and OLED vapor deposition masks. In addition to the equipment using the vertical transport vertical exposure method, there are also models that support horizontal transport horizontal exposure and single-wafer type models, which are compatible with various applications.

Visual Inspection Equipment Capricorn(AOI)

Capricorn is an automated visual inspection device for the FPD manufacturing process. Image information captured by a dedicated line scan CCD camera is analyzed by a high-performance image processing device, and defect information (position, presence, shape, OK/NG, etc.) is output instantaneously. Defect information is used for problem analysis and yield management. For example, defect information is deployed to defect correction equipment downstream of inspection equipment and used. In addition, which equipment in the upstream process and how the defect occurred can be immediately grasped from the location and content of the defect. Since its launch in 2002, the device has been widely used in various manufacturing processes for FPD (Flat Panel Displays) and can handle glass substrates up to approximately 3 x 3.4 m. Especially in the CF (color filter) process and CELL process (lamination process of TFT substrate and color filter substrate) in the LCD (liquid crystal display) manufacturing process, as well as in the module process, it is widely used and is a semi-finished product.

Color Film Defect Repair Equipment Jupiter(CF Repair)

Jupiter is a device that corrects defects generated in the FPD manufacturing process, such as various defects such as protrusion-shaped defects generated during film formation, foreign matter mixed in the film, and missing pixels and wiring patterns. It corresponds. Using the uniquely developed multi-function correction head and high-speed stage, defects can be corrected with high accuracy and high speed. In addition, it is equipped with a high-performance microscope that can properly magnify according to the shape of the defect, allowing you to observe and analyze the defect with a clear image. Jupiter has been used by all customers involved in FPD manufacturing since its introduction in 1999 and is especially suitable for color filter (CF) processes due to its high correction quality, reliability and ease of operation. We are proud of our overwhelming delivery record and are still highly regarded.

TFT Defect Repair Equipment Taurus (TFT Repair)

The TFT (Thin Film Transistor) process is the most important and complex process in the FPD manufacturing process. The performance and quality of LCD (Liquid Crystal Display) and OLED (Organic EL Display) are largely influenced by the technology and quality of the TFT used. Taurus is a defect correction device that supports yield management* for TFT manufacturing, which has become increasingly complex and difficult as displays evolve. The metal film can be locally formed by the gas window laser CVD, and the open defect in the metal wiring can be corrected. In addition to correcting defects by applying conductive materials, high-performance lasers can also perform high-precision and low-damage corrections. In addition, by adopting a high-speed stage, the substrate processing time is shortened even for the world's largest glass substrate measuring 3m x 3.4m.

Precision Coordinate Measuring Equipment Mercury (TP/CD)

FPDs are made by precisely stacking multiple layers of fine patterns, such as thin wires and electrodes, on a huge glass substrate. In addition, LCD (Liquid Crystal Display) and OLED (Organic EL Display) are completed by various processes by stacking a color filter (CF) substrate and a vapor deposition mask on a TFT (Thin Film Transistor) substrate. The Mercury is a coordinate measurement device that measures a wide variety of substrates up to 3m x 3.4m with sub-micron accuracy during FPD manufacturing where stack-up accuracy is required. It also supports the dimensional measurement of tiny pixel patterns of a few microns, which is required when manufacturing high-definition OLEDs for smartphones. From its inception in 2000 to today, it has an overwhelming delivery record, is unmatched by other companies as an industry standard machine, and is still highly regarded.

Micro-Sizing Device Venus(CD)

With the high definition of FPD (Flat Panel Display), TFT (Thin Film Transistor) is becoming more and more complex, and micro-dimensioning machine is becoming more and more important as a yield management tool. Venus is a micro-dimension measuring machine that can measure various substrates up to 3m x 3.4m with sub-micron accuracy to support various measurement requirements.

Reticle Visual Inspection Equipment Gemini(AOI)

Photomasks for displays are becoming clearer and larger due to increased production of small and medium sized OLEDs and FPDs using G10.5 (about 3m x 3.4m) mother glass. Reticle detection device Gemini is a simplified high-precision X-axis air guide device, an active vibration isolation table combined with a high-rigidity stone table top three-dimensionally, a high-precision high-rigidity mask bracket, and a unique rotating mechanism, ceramic vertical air guide The original technology of the buoy technology and the internal CAD database conversion circuit are used for comparison and detection, as well as various detection logics such as "mura mapping" and "high-sensitivity detection function of micro-contact holes". The image processing engine provides high-speed, high-precision visual inspection, which meets 8K Photomask requirements for displays and small and medium organic EL displays. Additionally, the design is flexible enough to accommodate factory layouts such as semi-built-in vibration isolation tables and flat surfaces containing thin film handling systems for direct access to the AGV.

Mask defect correction equipment Sculptor(Repair)

Sculptor is a defect correction device specially designed for FPD photomask defect correction. Open defects (missing or missing patterns) can be corrected by gas window laser CVD. In addition, it is equipped with a laser optimized for repairing short defects (abnormal pattern connections) for high-quality defect correction. It also supports photomask defect correction with halftone patterns* (patterns of light passing through a metal film). *(Photo) Observation image of halftone pattern transmitted illumination (The shading part is displayed in black, the transparent part is displayed in gray, and the translucent part is displayed in dark gray)