PRODUCTS
Product Service
Large glass substrate exposure equipment RZ
The large-scale glass substrate exposure equipment RZ is the core exposure equipment of the CF (color filter) process and is important in FPD (flat panel display) production. The RZ is an exposure device for the BM (Black Matrix) process released by NSK Technology*1 in 1994. Since then it has continued to grow and bear fruit with the evolution of FPD, and in 2018 sold the first G10.5 compatible machine (about 3m x 4m), establishing itself as an industry standard machine that we are proud of as a Exposure equipment, world-class share.
- Product description
-
Features
High precision and high throughput
By iteratively improving the alignment system and exposure optics, we achieved a good position Accuracy and high exposure uniformity (minimizing linewidth variation within the effective exposure range).Reliability
Our ingenuity of TCC, the addition of detection capabilities, and repeated software improvements to Reducing downtime due to defects is highly rated by customers.* 1: NSK Technology became our company's The subsidiary, renamed VN Systems, was subsequently absorbed and merged on November 25, 2016.
Previous Page
Next Page